Study of Cr/Sc-based multilayer reflecting mirrors using soft x-ray reflectivity and standing wave-enhanced x-ray fluorescence

Abstract : We study Cr/Sc-based multilayer mirrors designed to work in the water window range using hard and soft x-ray reflectivity as well as x-ray fluorescence enhanced by standing waves. Samples differ by the elemental composition of the stack, the thickness of each layer, and the order of deposition. This paper mainly consists of two parts. In the first part, the optical performances of different Cr/Sc-based multilayers are reported, and in the second part, we extend further the characterization of the structural parameters of the multilayers, which can be extracted by comparing the experimental data with simulations. The methodology is detailed in the case of Cr/B4C/Sc sample for which a three-layer model is used. Structural parameters determined by fitting reflectivity curve are then introduced as fixed parameters to plot the x-ray standing wave curve, to compare with the experiment, and confirm the determined structure of the stack.
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Optical Engineering, SPIE, 2017, 56 (11), pp.117101. 〈10.1117/1.OE.56.11.117101〉
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Meiyi Wu, Catherine Burcklen, Jean-Michel André, Karine Le Guen, Angelo Giglia, et al.. Study of Cr/Sc-based multilayer reflecting mirrors using soft x-ray reflectivity and standing wave-enhanced x-ray fluorescence. Optical Engineering, SPIE, 2017, 56 (11), pp.117101. 〈10.1117/1.OE.56.11.117101〉. 〈hal-01630278〉

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