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Archive Ouverte HAL-UPMC | |
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| HAL : hal-00661057, version 1 |
| DOI : 10.1016/j.susc.2010.03.012 |
| Fiche détaillée |  Récupérer au format |
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| Surface Science 604 (2010) 1015 |
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| Effect of annealing and B4C diffusion barriers on the interfaces of Sc/Si periodic multilayers |
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| Philippe Jonnard 1H. Maury 1 |
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| (17/03/2010) |
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| The optical properties of Sc/Si periodic multilayers are analyzed at three wavelengths in the x-ray range: 0.154, 0.712 and 12.7 nm. Fitting the reflectivity curves obtained at these three wavelengths enable us to constrain the parameters, thickness, density and roughness of the various layers, of the studied multilayers. Scattering curves were also measured at 12.7 nm on some samples to obtain an estimate of the correlation length of the roughness. Two sets of multilayers are used, with and without B4C diffusion barrier at the interfaces. To see the efficiency of the B4C layers the measures are performed after annealing up to 400°C. A dramatic change of the structure of the Sc/Si multilayer is observed between 100 and 200°C leading to a strong loss of reflectivity. For the Sc/B4C/Si/B4C multilayer the structure is stable up to 200°C after which a progressive evolution of the stack occurs. |
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| 1 : | Laboratoire de chimie physique-matière et rayonnement (LCP-MR) |
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CNRS : UMR7614 – Université Pierre et Marie Curie [UPMC] - Paris VI |
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| 2 : | CNR - Istituto Officina dei Materiali IOM- |
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CNR - Consiglio Nationale delle Ricerche |
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| 3 : | Laboratoire Charles Fabry de l'Institut d'Optique (LCFIO) |
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Institut d'Optique Graduate School (IOGS) – CNRS : UMR8501 – Université Paris XI - Paris Sud |
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| lcf-scop |
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| Domaine | : | Physique/Matière Condensée/Autre Physique/Physique/Optique Sciences de l'ingénieur/Matériaux |
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| multilayer – x-ray reflectivity – x-ray scattering – diffusion barrier – annealing – Sc – Si – B4C |
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| Liste des fichiers attachés à ce document : | |||||
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| hal-00661057, version 1 | |
| http://hal.archives-ouvertes.fr/hal-00661057 | |
| oai:hal.archives-ouvertes.fr:hal-00661057 | |
| Contributeur : Philippe Jonnard | |
| Soumis le : Mercredi 18 Janvier 2012, 14:05:40 | |
| Dernière modification le : Lundi 23 Janvier 2012, 11:25:40 | |
